Bearings for Semiconductor Applications


As integrated circuit manufacturers strive to make their chips faster, smaller and less expensive, semiconductor fabrication equipment companies become more dependent on advanced materials and components to achieve the desired performance. Using bearings made from high performance polymers such as PEEK or PVDF rather than standard steels & plastics provides superior chemical and corrosion resistance necessary to survive the semiconductor production processes.


The semiconductor manufacturing process is extremely aggressive. Bearings are invariably housed in areas of the processing system where they need to withstand highly corrosive liquids, gases and plasmas often at elevated temperatures or in vacuum conditions. KMS Bearings, Inc.,  is a leading developer and manufacturer of high performance polymer bearings. Our sales engineers are available to work with you to establish the optimum bearing race materials and design to maximize the performance of your semiconductor manufacturing equipment.

Critical Design features:

  • PVDF or PEEK plastic races and cage
  • 316 stainless, Borosilicate glass or SiN2 Ceramic balls

Bearing Construction features a Single and Double row construction True Race Technology™ ball grooves for optimum load, speed and durability. Anti-clogging Flow-Thru Technology™ designs features ensure continued operation while being submerged or exposed to contamination and to tolerate suspended particles in liquids.

Additional reasons for use:semiconductor bearing

  • High Heat Capability: KMS bearings made from either PEEK or Kynar® have higher heat capability (180°F to 450°F) over conventional POM plastic or steel bearings.
  • Lube-Free: Due to the natural lubricity of engineering polymers combined with the absence of metal to metal contact no lubrication is required. This ability to operate without lubrication allows the bearing to be maintenance free and non-contaminating to the environment.
  • Less Friction: Engineered polymer races fitted with either 316 stainless, glass or ceramic balls naturally have less friction than metal to metal steel race bearings.

Contact KMS today to learn more about how a KMS high performance plastic bearing can benefit your semiconductor application!  For in stock sizes for both PEEK and PVDF see below for available stock sizes.

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Plastic Vs Steel

Cleanliness/Hygienic: Plastic bearings generally operate cleaner than metal bearings because they do not need lubrication, they are resistant to corrosion, and they can be washed down without the worry of re-lubing. This capability makes them a viable option for clean room environments, and wash down applications. A plastic bearing made from either PBT, PVDF or PEEK can be post sterilized by standard methods such as autoclave or Gamma.

Read all the benefits of Plastic vs Steel Bearings